Miniaturized Liquid Film Sensors

The flow in micro channel has the characteristics of high heat and mass transfer. Therefore, it is expected to apply to micro heat exchanger, cooling of semiconductor and micro chemical reactor. In addition, the clarification of local micro flow structure in two-phase flow is important for the safety assessments in nuclear power plants. Many researchers have focused on micro two-phase flow and they have investigated the flow. However, most of them use image observation and processing. The aim of this study is the clarification of two-phase flow in micro channel by using a micro film sensor based on a conductance measurement. A novel conductance sensor (Fig.1) is developed in clean room, and this sensor can measure the micro film layer directly.

Enlarged view: mcsens
Fig. 1 Microconductivity sensor
Enlarged view: mlfs_char
Fig. 2 Output signal vs water layer thickness

A test channel (Fig.3) has a height of 100µm and a width of 2 mm. Conductive water flows in the channel and air is injected from the upstream of measurement area. Thus the air-water two-phase flow is measured by the micro film sensor.

Download Miniaturized Liquid Film Sensor Masks (PDF, 38 KB)

Enlarged view: experimental-setup
Fig. 3 Experimental setup
Enlarged view: bubble_rec
Fig. 4 Bubble lower profile reconstruction

For further information contact Francesco Paolo D'Aleo

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